The ZELMI lab for transmission electron microscopy (S)TEM provides high-resolution images of electron-transparent samples, analyses of topography and microstructure, crystal and crystal defect analyses via EDX as well as sub-atomic resolution in HR-(S)TEM.
For high-resolution transmission electron microscopy analyses, two devices are available. The JEOL JEM-ARM300F2 "GrandARM2"is one of the most versatile and highest-resolution STEMs. The first instrument of this type outside Japan was …

The electron beam microprobe - EPMA is applied for qualitative and quantitative elemental analysis with highest spatial resolution and detection sensitivity. The electron beam microprobe is a Jeol JXA-8530F equipped with a Schottky field emission cathode primarily used for quantitative elemental analyses of high accuracy and resolution.
With the JEOL JXA-8530F, both SE and BSE recordings are possible in COMPO and TOPO modes. It is equipped with 5 WDX spectrometers for wavelength dispersive …

Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope …

The SEM laboratory provides high-resolution images with topography and element contrast, elemental analysis with EDX, crystal analysis with EBSD and in situ analysis, e.g. tensile-pressure module.
The SEM laboratory covers conventional scanning electron microscopy (SEM), high-resolution scanning electron microscopy (HR-SEM) and low vacuum scanning electron microscopy (VP SEM) analyses.
For conventional SEM measurements the follwing devices are available: a Hitachi S-2700 scanning …