ZELMI - Focused Ion Beam - FIB

TU - Technische Universität Berlin
last updated: July 19, 2023

About the Laboratory

ZELMI - Focused Ion Beam - FIB

TU - Technische Universität Berlin
@ Institute of Optics and Atomic Physics
This Laboratory is part of:

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Description

Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope and a Ga-ion microscope and is therefore used not only for analysis but also for sample surface processing.

Instruments

  • FIB-SEM - Focused Ion Beam Scanning Electron Microscope
    Dual Beam Instrument

  • Focused Ion Beam System

Analytical Methods

  • FIB-SEM - Focused Ion Beam Scanning Electron Microscopy

  • EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS

Laboratory Keywords

  • High-resolution Scanning Ion Beam

Disciplines

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