ZELMI - Focused Ion Beam - FIB
TU - Technische Universität Berlin
last updated: July 19, 2023
About the Laboratory
ZELMI - Focused Ion Beam - FIB
TU - Technische Universität Berlin
@ Institute of Optics and Atomic Physics
This Laboratory
is part of:
- ZELMI - Electron Microscopy Center laboratory complex
- Networks: Geo.X
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Description
Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope and a Ga-ion microscope and is therefore used not only for analysis but also for sample surface processing.
Instruments
-
FIB-SEM - Focused Ion Beam Scanning Electron Microscope
Dual Beam Instrument -
FIB - Focused Ion Beam
Focused Ion Beam System
Analytical Methods
- FIB-SEM - Focused Ion Beam Scanning Electron Microscopy
-
EDAX - Energy Dispersive Analysis of X-Ray
EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS
Laboratory Keywords
In addition to the instruments and analytical methods listed above, these keywords help to describe the work done in the laboratory. This may include the type of samples, standard materials, specific preparative or analytical methods and specific instrument characteristics.
- High-resolution Scanning Ion Beam