ZELMI - Electron Probe Microprobe Analysis - EPMA

TU - Technische Universität Berlin
last updated: July 19, 2023

About the Laboratory

ZELMI - Electron Probe Microprobe Analysis - EPMA

TU - Technische Universität Berlin
@ Institute of Optics and Atomic Physics
This Laboratory is part of:


  • Tbd
Visit us on our website in DE / EN


The electron beam microprobe - EPMA is applied for qualitative and quantitative elemental analysis with highest spatial resolution and detection sensitivity. The electron beam microprobe is a Jeol JXA-8530F equipped with a Schottky field emission cathode primarily used for quantitative elemental analyses of high accuracy and resolution.
With the JEOL JXA-8530F, both SE and BSE recordings are possible in COMPO and TOPO modes. It is equipped with 5 WDX spectrometers for wavelength dispersive elemental analyses and one EDX detector for energy dispersive elemental analyses. Both WDX and EDX linescans and element mappings can be created. Furthermore, it is possible to determine the elemental composition as well as the density of thin films using the thin film software StrataGem. Using an X-ray source (iMOXS), X-ray fluorescence (µRFA) studies can also be performed on the microprobe. Trace elements can be detected with both the µXRF and WDX spectrometers.


  • EPMA, Electron Micro Probe Analyzer, Electron Probe Microanalyzer, X-Ray-Microanalyzer

Analytical Methods

  • EPMA, Electron Probe Microanalysis

  • Micro X-Ray Fluorescence, X-Ray Fluorescence Analysis, X-Ray Fluorescence Spectroscopy

  • EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS
  • WDS - Wavelength Dispersive X-Ray Spectroscopy

Laboratory Keywords

  • BSE and SE Imaging
  • Element Distribution Maps