ZELMI - Electron Probe Microprobe Analysis - EPMA

TU - Technische Universität Berlin

last updated: July 19, 2023

About the Laboratory

ZELMI - Electron Probe Microprobe Analysis - EPMA

TU - Technische Universität Berlin

@ Institute of Optics and Atomic Physics

This Laboratory is part of:

ZELMI - Electron Microscopy Center laboratory complex
Networks: Geo.X

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Description

The electron beam microprobe - EPMA is applied for qualitative and quantitative elemental analysis with highest spatial resolution and detection sensitivity. The electron beam microprobe is a Jeol JXA-8530F equipped with a Schottky field emission cathode primarily used for quantitative elemental analyses of high accuracy and resolution.
With the JEOL JXA-8530F, both SE and BSE recordings are possible in COMPO and TOPO modes. It is equipped with 5 WDX spectrometers for wavelength dispersive elemental analyses and one EDX detector for energy dispersive elemental analyses. Both WDX and EDX linescans and element mappings can be created. Furthermore, it is possible to determine the elemental composition as well as the density of thin films using the thin film software StrataGem. Using an X-ray source (iMOXS), X-ray fluorescence (µRFA) studies can also be performed on the microprobe. Trace elements can be detected with both the µXRF and WDX spectrometers.

Instruments

An electron microprobe is an electron microscope designed for the non-destructive x-ray microanalysis and imaging of solid materials. It is capable of high spatial resolution and relatively high analytical sensitivity. [Source: Caltech] (Source: Global Change Master Directory (GCMD). 2023. GCMD Keywords, Version 16.3 [...] )
EMP - Electron Microprobe
EPMA, Electron Micro Probe Analyzer, Electron Probe Microanalyzer, X-Ray-Microanalyzer

Analytical Methods

An electron microprobe is an electron microscope designed for the non-destructive x-ray microanalysis and imaging of solid materials. It is capable of high spatial resolution and relatively high analytical sensitivity. [Source: Caltech]
This is a general term for methods using bombardment of a solid specimen by electrons which generate a variety of signals providing the basis for a number of different analytical techniques. (Source: IUPAC; https://media.iupac.org/publications/analytical_compendium/) (Source: Global Change Master Directory (GCMD). 2023. GCMD Keywords, Version 16.3 [...] )
EMPA - Electron Microprobe Analysis
EPMA, Electron Probe Microanalysis
Measurement method of X-Ray fluorescence used to measure amounts of elements in a material. Micro-XRF (μ-XRF) analysis uses highly brilliant X-Ray sources (synchrotron source and spot size 100 nm to 2 μm) and microfocussing X-Ray optics to give fg to ag detection limits. (Source: IUPAC; https://doi.org/10.1515/pac-2019-0302)
µXRF - Micro-X-Ray Fluorescence Spectroscopy
Micro X-Ray Fluorescence, X-Ray Fluorescence Analysis, X-Ray Fluorescence Spectroscopy
The Energy Dispersive Analysis of X-ray (EDAX) is a tool that determines the chemical composition of elements.
The Energy Dispersive Analysis of X-Ray (EDAX) is a tool that determines the chemical composition of elements. (Source: NASA; UUID: b3a7155c-5089-4388-a148-8d4defc520f8); Measurement method of X-Ray fluorescence analysis in which the energies and intensities of characteristic X-radiation are used to measure amounts of elements. (Source: IUPAC; https://doi.org/10.1515/pac-2019-0302) (Source: Global Change Master Directory (GCMD). 2023. GCMD Keywords, Version 16.3 [...] )
EDAX - Energy Dispersive Analysis of X-Ray
EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS
WDS - Wavelength Dispersive X-Ray Spectroscopy
WDX, WDXS

Laboratory Keywords

In addition to the instruments and analytical methods listed above, these keywords help to describe the work done in the laboratory. This may include the type of samples, standard materials, specific preparative or analytical methods and specific instrument characteristics.

BSE and SE Imaging
Element Distribution Maps

Disciplines

Geoscience > Geochemistry > Geochemistry
Geochemistry
Geoscience > Geochemistry > Mineralogy
Mineralogy
Geoscience > Geology > Geology
Geology

The Research Network for Geosciences in Berlin and Potsdam

ZELMI - Electron Probe Microprobe Analysis - EPMA

TU - Technische Universität Berlin

About the Laboratory

ZELMI - Electron Probe Microprobe Analysis - EPMA

Access

Description

Instruments

Analytical Methods

Laboratory Keywords

Disciplines

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