ZELMI - Scanning Electron Microscope -SEM

TU - Technische Universität Berlin
last updated: July 19, 2023

About the Laboratory

ZELMI - Scanning Electron Microscope -SEM

TU - Technische Universität Berlin
@ Institute of Optics and Atomic Physics
This Laboratory is part of:

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Description

The SEM laboratory provides high-resolution images with topography and element contrast, elemental analysis with EDX, crystal analysis with EBSD and in situ analysis, e.g. tensile-pressure module.
The SEM laboratory covers conventional scanning electron microscopy (SEM), high-resolution scanning electron microscopy (HR-SEM) and low vacuum scanning electron microscopy (VP SEM) analyses.
For conventional SEM measurements the follwing devices are available: a Hitachi S-2700 scanning electron microscope with a tungsten cathode, optimised for large samples and analytical questions, and a Hitachi S-520 scanning electron microscope with tungsten cathode, optimised for the self-reliant use by trainees and for hands-on training.
The high-resolution SEM measurements are performed with a low vacuum high-resolution SEM ZEISS Gemini SEM500 NanoVP, a Hitachi SU8030 SEM with a cold field emission cathode, a Zeiss DSM 982 GEMINI SEM with thermal field emission cathode optimised for high-resolution and X-Ray analysis at low accelerating voltage and a Hitachi S-4000 SEM with cold field emitter optimised for highest resolution.

Instruments

  • HR-SEM - High-Resolution Scanning Electron Microscope

Analytical Methods

  • EBSD - Electron Backscatter Diffraction
  • HR-SEM - High-Resolution Scanning Electron Microscopy

  • EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS

Laboratory Keywords

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