The FEI Quanta 3D FEG is a state-of-the-art Dual Beam machine combining traditional thermal emission scanning electron microscope (SEM) with focused ion beam (FIB). This combination allows the characterization of materials in 2D and 3D (tomography), TEM sample preparation (TEM Lamella), observations at the subsurface of the specimens (cross section imaging) and structural modification of sample surfaces at the micrometer to nanometer scale.
The machine features three different vacuum modes …

One key feature of the FIB is the fast and easy TEM sample preparation. The FEI Helios G4 UC Dual Beam is part of the fourth generation of the leading Helios Dual Beam family. It combines the innovative Elstar electron column with high-current UC+ technology for extreme high-resolution imaging and the highest materials contrast with the superior Tomahawk ion column for the fastest, easiest, and most precise high-quality sample preparation. In addition to the most advanced electron and ion …

Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope …

Samples that are to be examined with the aid of a microscope must be prepared specifically for the instrument. To do this, the conditions of the instrument and the sample holder must be known: sample size - sample height or thickness - surface condition - conductivity - vacuum resistance. For any examination procedure, the sample should first be viewed with a light microscope.
There are preparation facilities for the use of the available equipment. This option is primarily intended for users …