ZELMI - Preparation

TU - Technische Universität Berlin
last updated: July 19, 2023

About the Laboratory

ZELMI - Preparation

TU - Technische Universität Berlin
@ Institute of Optics and Atomic Physics
This Laboratory is part of:


  • Tbd


Samples that are to be examined with the aid of a microscope must be prepared specifically for the instrument. To do this, the conditions of the instrument and the sample holder must be known: sample size - sample height or thickness - surface condition - conductivity - vacuum resistance. For any examination procedure, the sample should first be viewed with a light microscope.
There are preparation facilities for the use of the available equipment. This option is primarily intended for users who do not have their own preparation laboratories and, like the instrument hours, is considered a service.

  • Metallographic preparation for light microscopy, scanning electron microscopy and the electron beam microprobe
  • Preparation for transmission electron microscopy
  • Cross Section Polisher
  • Target Preparation with FIB
  • Coating
  • Plasma-Cleaning


  • FIB-SEM - Focused Ion Beam Scanning Electron Microscope
    Dual Beam Instrument

  • Sliding Microtome
  • Saw
  • Polishing Machine
  • Coater
  • Sputter
  • BIB - Broad Ion Beam Polisher
    Cross Section Polisher

  • Focused Ion Beam System

Analytical Methods

  • FIB-SEM - Focused Ion Beam Scanning Electron Microscopy
  • Grinding
  • Polishing
  • Sputtering
  • Coating

Laboratory Keywords