PISA – FEI Quanta 3D Dual Beam (SEM & FIB)

The FEI Quanta 3D FEG is a state-of-the-art Dual Beam machine combining traditional thermal emission scanning electron microscope (SEM) with focused ion beam (FIB). This combination allows the characterization of materials in 2D and 3D (tomography), TEM sample preparation (TEM Lamella), observations at the subsurface of the specimens (cross section imaging) and structural modification of sample surfaces at the micrometer to nanometer scale.
The machine features three different vacuum modes (High Vacuum, Low Vacuum & Environmental Modes), which accommodates the widest range of samples for SEM analysis; it can be either dry inorganic samples or hydrated biological samples. It also has an EBSD detector for the crystallographic orientation analysis, grain and phase analysis of material and geological samples with an optional EDS detector for semi-quantitative, point & shoot chemical analyses.