The FEI Quanta 3D FEG is a state-of-the-art Dual Beam machine combining traditional thermal emission scanning electron microscope (SEM) with focused ion beam (FIB). This combination allows the characterization of materials in 2D and 3D (tomography), TEM sample preparation (TEM Lamella), observations at the subsurface of the specimens (cross section imaging) and structural modification of sample surfaces at the micrometer to nanometer scale.
The machine features three different vacuum modes …

Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope …