The electron beam microprobe - EPMA is applied for qualitative and quantitative elemental analysis with highest spatial resolution and detection sensitivity. The electron beam microprobe is a Jeol JXA-8530F equipped with a Schottky field emission cathode primarily used for quantitative elemental analyses of high accuracy and resolution.
With the JEOL JXA-8530F, both SE and BSE recordings are possible in COMPO and TOPO modes. It is equipped with 5 WDX spectrometers for wavelength dispersive …