The FEI Quanta 3D FEG is a state-of-the-art Dual Beam machine combining traditional thermal emission scanning electron microscope (SEM) with focused ion beam (FIB). This combination allows the characterization of materials in 2D and 3D (tomography), TEM sample preparation (TEM Lamella), observations at the subsurface of the specimens (cross section imaging) and structural modification of sample surfaces at the micrometer to nanometer scale.
The machine features three different vacuum modes …