Focused Ion Beam Analysis are applied for high-resolution SEM images of cross-sectional surfaces and their prior target preparation, high-resolution scanning ion images (SIM) with topography and channeling contrast, and furthermore target preparation of electron transparent (S)TEM samples and lithographic processing of samples. The Focused Ion Beam (FIB) is the so-called Nano-Workbench, a dual-beam FIB/SEM instrument (Thermofisher HELIOS 600) combining a high-resolution electron microscope …

Samples that are to be examined with the aid of a microscope must be prepared specifically for the instrument. To do this, the conditions of the instrument and the sample holder must be known: sample size - sample height or thickness - surface condition - conductivity - vacuum resistance. For any examination procedure, the sample should first be viewed with a light microscope.
There are preparation facilities for the use of the available equipment. This option is primarily intended for users …