Laboratory for Electron Beam Microanalysis

FU - Freie Universität Berlin
last updated: July 19, 2023

About the Laboratory

Laboratory for Electron Beam Microanalysis

FU - Freie Universität Berlin
@ Mineralogy
This Laboratory is part of:


  • Tbd
Visit us on our website in DE / EN


The Institute of Geological Sciences hosts a JEOL JXA 8200 Superprobe equipped with five wavelength-dispersive spectrometers (WDS) and one energy-dispersive (EDS) detector. We perform non-destructive chemical analysis and imaging of solid materials at the micrometer scale using a focused electron beam. The instrument is primarily used in WDS mode for quantitative analysis against reference materials and element distribution mapping. Other applications are: qualitative element analysis (EDS, WDS), surface morphology (secondary electron detector), element contrast imaging (backscatter electron detector, EBSD). User regulations can be found here.


  • EPMA, Electron Micro Probe Analyzer, Electron Probe Microanalyzer, X-Ray-Microanalyzer

Analytical Methods

  • EBSD - Electron Backscatter Diffraction

  • EPMA, Electron Probe Microanalysis

  • EDS, EDX, EDXA, EDXS, Energy Dispersive X-Ray Microanalysis, Energy Dispersive X-Ray Spectroscopy, Energy-dispersive X-Ray Analysis, Energy-dispersive X-Ray Spectroscopy, XEDS
  • WDS - Wavelength Dispersive X-Ray Spectroscopy

Laboratory Keywords